Graphdiyne (GDY) is recognized as a compelling candidate for the fabrication of next-generation high-speed low-energy electronic devices due to its inherent p-type semiconductor characteristics. However, the development of GDY for applications in field-effect transistors (FETs), complementary metal-oxide-semiconductor (CMOS), and logic devices remains constrained by the relatively low carrier mobility reported in current experimental studies. Herein, the synthesis of layer-controlled hydrogen-substituted graphdiyne (HsGDY) films directly on silicon substrates under a supercritical CO2 atmosphere is reported, along with the fabrication of these films into HsGDY-based FETs. The transfer-free growth strategy eliminates performance degradation caused by post-synthesis transfer processes. The resulting HsGDY FETs exhibit a remarkable hole mobility of up to 3800 cm2 V-1 s-1 at room-temperature, which is an order of magnitude higher than that of most p-type semiconductors. The synthesis of transfer-free HsGDY wafers provides a new strategy for resolving the carrier mobility mismatch between p-channel and n-channel two-dimensional metal-oxide-semiconductor devices.
- Paper ID: 2510.09998
- Title: Ambient-Stable Transfer-Free Graphdiyne Wafers with Superhigh Hole Mobility at Room Temperature
- Authors: Beining Ma, Jianyuan Qi, Xinghai Shen (Peking University)
- Classification: cond-mat.mtrl-sci physics.chem-ph
- Corresponding Author: Prof. X. H. Shen (xshen@pku.edu.cn)
- Paper Link: https://arxiv.org/abs/2510.09998
Graphdiyne (GDY), owing to its intrinsic p-type semiconducting properties, is considered a promising candidate material for fabricating next-generation high-speed, low-power electronic devices. However, the application development of GDY in field-effect transistors (FETs), complementary metal-oxide-semiconductor (CMOS), and logic devices has been limited due to the relatively low carrier mobility reported in current experimental studies. This paper reports the direct synthesis of layer-controlled hydrogen-substituted graphdiyne (HsGDY) thin films on silicon substrates under supercritical CO₂ atmosphere, and the fabrication of HsGDY-based field-effect transistors from these films. The transfer-free growth strategy eliminates performance degradation caused by post-synthesis transfer processes. The resulting HsGDY FETs exhibit hole mobility as high as 3800 cm² V⁻¹ s⁻¹ at room temperature, which is approximately one order of magnitude higher than most p-type semiconductors.
In the post-Moore era, silicon-based semiconductor technology faces critical challenges at sub-10 nanometer nodes, including short-channel effects, reduced carrier mobility, and increased power consumption. Two-dimensional (2D) semiconductors, with their atomic-scale thickness, ultra-smooth surfaces, ultra-high carrier mobility, and excellent tunable electrical properties, are considered among the most promising candidates for continuing Moore's Law.
- Carrier Mobility Mismatch: The carrier mobility of most p-type semiconductors typically ranges from 10⁻² to 10² cm² V⁻¹ s⁻¹, with only black phosphorus (BP) reporting room-temperature hole mobility exceeding 10³ cm² V⁻¹ s⁻¹
- PMOS and NMOS Performance Disparity: The carrier mobility mismatch between p-channel and n-channel metal-oxide-semiconductor devices significantly affects data processing speed, increases power consumption, and reduces performance
- Existing Method Limitations:
- Transfer Process Issues: Traditional GDY thin films require transfer to silicon wafers, inevitably introducing impurity contamination and structural damage, reducing hole mobility
- Photolithography Difficulties: GDY films transferred to silicon wafers are difficult to fabricate into FET arrays using photolithography techniques
- Lack of Catalytic Activity: Silicon substrates lack catalytic activity for GDY monomer coupling
- Development of Transfer-Free HsGDY Wafer Synthesis Method: First realization of in-situ growth of 2D GDY thin films on silicon substrate surfaces
- Achievement of Superhigh Hole Mobility: HsGDY FETs demonstrate room-temperature hole mobility as high as 3.8×10³ cm² V⁻¹ s⁻¹, approximately one order of magnitude higher than most p-type semiconductors
- Resolution of Carrier Mobility Mismatch Problem: Provides a new strategy for addressing carrier mobility mismatch between p-channel and n-channel 2D metal-oxide-semiconductor devices
- Standard Photolithography Process Compatibility: Transfer-free HsGDY wafers can be integrated into standard photolithography workflows
A spatially confined synthesis strategy is employed under supercritical CO₂ environment by sandwiching copper foil with silicon wafers:
- Catalyst Source: Copper ions released from copper foil migrate and adsorb onto the silicon surface
- Catalytic Reaction: Copper ions catalyze the coupling reaction of GDY monomers
- Direct Epitaxial Growth: Direct epitaxial growth is achieved on the substrate
- Large-area uniform few-layer HsGDY films are achieved through a simple sandwiching method (silicon wafer and copper foil)
- Supercritical CO₂ environment provides ideal reaction conditions
By precisely adjusting the concentration of triethynylbenzene (TEB), HsGDY wafers with different layer numbers are successfully prepared:
- Thinnest film thickness approximately 2.2 nm, corresponding to 6-layer HsGDY wafers
- Thickness range: 2.2-22 nm
- Eliminates PMMA residual contamination
- Avoids structural damage
- Enhances carrier mobility
- Compatible with standard photolithography processes
- Reaction Temperature: 50°C
- Pressure: 100 bar (supercritical CO₂)
- Reaction Time: 24 hours
- Monomer Concentration: 0.20-0.32 mg mL⁻¹ (TEB in acetone)
- Solvent System: 70% TMEDA + 30% pyridine
- Hall Bar Structure: Length 110 μm, width 20 μm
- Electrode Material: Au/Ti (50 nm/5 nm)
- Gate Dielectric: SiO₂ (thickness 4.8 nm, capacitance 719.4 nF cm⁻²)
- Device Architecture: 8-electrode Hall bar configuration
- Raman Spectroscopy: Confirms characteristic peaks of HsGDY (1357, 1573, 1934, 2212 cm⁻¹)
- XPS: Analyzes chemical states
- SEM-EDS: Confirms film uniformity
- AFM: Measures thickness
- TEM: Analyzes crystal structure
- Average Hole Mobility of 6-layer HsGDY FET: 3.8×10³ cm² V⁻¹ s⁻¹
- Thickness Dependence: As film thickness decreases from 22 nm to 2.2 nm, hole mobility increases from 7.3×10² cm² V⁻¹ s⁻¹ to 3.8×10³ cm² V⁻¹ s⁻¹
- On/Off Ratio: Ion/Ioff = 1×10⁴
- Conductivity: 2.3×10³ S m⁻¹ (298 K)
- Contact Type: Ohmic contact
- Gate Control: Pronounced gate control characteristics
- p-type Characteristics: Sharp current surge observed at Vg ≈ -5 V
Device performance remains constant after 60 days in ambient air without any encapsulation, demonstrating excellent environmental stability.
HsGDY hole mobility (3800 cm² V⁻¹ s⁻¹) significantly surpasses other p-type 2D materials:
- Black Phosphorus: 1350 cm² V⁻¹ s⁻¹
- Te: 700 cm² V⁻¹ s⁻¹
- WSe₂: 250 cm² V⁻¹ s⁻¹
- MoS₂: 68 cm² V⁻¹ s⁻¹
Electron paramagnetic resonance (EPR) measurements reveal the p-type semiconductor behavior mechanism:
- HsGDY exhibits a symmetric EPR signal with g-value of 2.002, characteristic of oxygen vacancies
- Oxygen atom removal disrupts local conjugation, producing carbon dangling bonds
- Dangling bonds act as strong electron acceptors, capturing electrons from the valence band and generating mobile holes
- GDY, as an emerging 2D carbon allotrope, features a planar structure with sp² and sp hybridized carbon atoms
- Theoretical predictions indicate GDY is an intrinsic p-type 2D semiconductor with superhigh hole mobility
- Existing experimental reports of GDY FETs show relatively low hole mobility (0.033-247.1 cm² V⁻¹ s⁻¹)
- Existing methods: copper foil, quartz, MXene substrates, etc.
- This work: First realization of in-situ growth on silicon wafer surfaces
- Successfully developed a method for in-situ growth of HsGDY on silicon substrates
- Achieved the highest hole mobility among p-type 2D semiconductors to date
- Resolved performance degradation issues caused by transfer processes
- Provides a solution to the carrier mobility mismatch problem in CMOS technology
- CMOS Technology: Can be matched with high carrier mobility n-type semiconductors for heterogeneous integrated CMOS
- Logic Devices: Improves switching speed of CMOS logic gates
- Low-Power Devices: Achieves required switching speed at lower operating voltages, significantly reducing energy consumption
- Currently only achieves 1×1 cm wafer size
- Further optimization needed for larger-scale wafer growth
- Long-term stability requires more detailed investigation
- Strong Technical Innovation: First realization of in-situ GDY growth on silicon substrates, addressing key technical bottlenecks
- Significant Performance Breakthrough: Hole mobility approximately one order of magnitude higher than existing p-type 2D semiconductors
- High Practical Value: Compatible with standard semiconductor processes, with good industrialization prospects
- Comprehensive Characterization: Multiple characterization techniques fully verify material structure and performance
- Wafer Size Limitation: Currently only achieves 1×1 cm size, with significant gap to industrial applications
- Insufficient Mechanism Explanation: Microscopic mechanisms underlying superhigh mobility require more detailed theoretical analysis
- Missing Temperature Characteristics: Lacks performance characterization at different temperatures
- Academic Value: Provides important progress in 2D materials electronics
- Industrial Significance: Offers new material options for next-generation semiconductor device development
- Reproducibility: Relatively simple method with good reproducibility
- High-performance CMOS devices
- Low-power logic circuits
- High-frequency electronic devices
- Flexible electronic devices
The paper cites 49 related references, covering important research work in 2D materials, graphdiyne synthesis, field-effect transistors, and related fields, providing solid theoretical foundation and technical support for this research.